The Physics of Submicron Lithography formatIsbn:Hardcover 9780306435782 UniversityofFlorence LarryChen KodakResearchLabs JohnP 9783642696978 UniversityofFlorence LarryChen KodakResearchLabs JohnP Giamila Fantuzzi and a panel of experts have generated completely new chapters to reflect the use of many novel mouse strains and the hundreds of recent studies on cytokine physiology 4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2 3 flm in the 4 pattern and having 10 105 transistors per circuit In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer