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Mikrosystemtechnik auf Silizium James J the author fundamentally revised and 9783642696978
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Mikrosystemtechnik auf Silizium James J the author fundamentally revised and 9783642696978
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Mikrosystemtechnik auf Silizium James J the author fundamentally revised and 9783642696978 the author fundamentally revised and newly organized the contents of the work We hope that for researchers active in the field these books should provide a useful reference source for their work Zur Abrundung des Themas werden einige Komponenten zur Verbesserung der mikroelektronischen Schaltungen im monolithischen Integrationsprozeß angesprochen Die Basis der monolithischen Systemintegration auf Silizium wird ausgehend von der mikroelektronischen Prozeßtechnik diskutiert
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